Semiconductor Material and Device Characterization

By Dieter K. Schroder

Book Overview

Semiconductor Material and Device Characterization is the only book on the market devoted to the characterization techniques used by the modern semiconductor industry to measure diverse semiconductor materials and devices. It covers the full range of electrical and optical characterization methods while thoroughly treating the more specialized chemical and physical techniques. This newly revamped and expanded Second Edition incorporates the many innovations that have come to dominate the field during the past decade. From scanning probe techniques to the detection of metallic impurities in silicon wafers to the use of microwave reflection to measure contactless resistivity, each chapter presents state-of-the-art tools and techniques, most of which were in their infancy or had not yet been developed when the previous edition first came out. Featured here are: * An entirely new chapter on reliability and probe microscopy * Numerous examples and end-of-chapter problems - new to this edition * Five hundred illustrations revised for this edition * Updated bibliography with over 1,200 references * Easy-to-use text including a real-world mix of units rather than strictly MKS units. This practical new edition is ideal for textbook adoptions at the graduate level and is destined to become an essential reference for research and development teams in the semiconductor industry.

• Format: Hardcover
• Language: English
• ISBN: 0471241393
• ISBN13: 9780471241393
• Release Date: June 1998
• Publisher: Wiley-Interscience
• Length: 784 Pages
• Weight: 2.73 lbs.
• Dimensions: 1.6" x 6.1" x 9.6"

Customer Reviews

Essential text

This is an essential text for engineers, scientists, and graduate students working in the semiconductor field. It contains a thorough review of all major electrical, optical, and physical characterization methods that are commonly used. Descriptions of techniques are generally conceptually oriented, clearly stated, and do not rely excessively on equations. In addition, many useful figures are included to help explain concepts when introduced. Up to date references are included for essentially every technique mentioned.

Great reference

Schroder has compiled an extensive and very nearly complete guide to modern characterization techniques that apply mostly to semiconductors and solid state devices, but also to techniques used in general materials analysis. We used this text in a graduate level course in EE and found it easy to read through and concise for use as a quick reference. Well worth the money.

Semiconductor Material and Device Characterization

This book offers an outstanding review of various techniques of semiconductor device processing. It is the type of book that is an invaluable reference to the device engineer. It's breadth is outstanding.