RF Power for Industrial Applications

By Louis E. Frenzel

Book Overview

This book, the only one of its kind on the market, focuses on RF (Radio Frequency) power for use in semiconductor manufacturing equipment that generate a plasma for processing wafers. The concepts,... This description may be from another edition of this product.

• Format: Paperback
• Language: English
• ISBN: 0130965774
• ISBN13: 9780130965776
• Release Date: May 2003
• Publisher: Prentice Hall
• Length: 288 Pages
• Weight: 1.54 lbs.