Introductory Mems: Fabrication and Applications

by Richard A. Layton and Thomas M. Adams

Book Overview

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics...

• Format: Paperback
• Language: English
• ISBN: 1489984216
• ISBN13: 9781489984210
• Release Date: September 2014
• Publisher: Springer
• Length: 440 Pages
• Weight: 1.41 lbs.
• Dimensions: 0.9" x 6.1" x 9.2"