Film Deposition by Plasma Techniques

by Mitsuharu Konuma

Book Overview

Properties of thin films depend strongly upon the deposition technique and conditions chosen. In order to achieve the desired film, optimum deposition conditions have to be found by carrying out experiments in a trial-and- error fashion with varying parameters. The data obtained on one growth apparatus are often not transferable to another. This is especially true for film deposition processes using a cold plasma because of our poor under- standing...

• Format: Paperback
• Language: English
• ISBN: 3642845134
• ISBN13: 9783642845130
• Release Date: December 2011
• Publisher: Springer
• Length: 224 Pages
• Weight: 0.75 lbs.
• Dimensions: 0.5" x 6.1" x 9.2"