From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications

By Marc J. Madou

From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and... This description may be from another edition of this product.

• Format: Hardcover
• Language: English
• ISBN: 142005516X
• ISBN13: 9781420055160
• Release Date: June 2011
• Publisher: CRC Press
• Length: 654 Pages
• Weight: 1.70 lbs.
• Dimensions: 11.0" x 8.3" x 1.4"